Menu
Home
People
Places
Arts
History
Plants & Animals
Science
Life & Culture
Technology
Reference.org
Microfabrication
open-in-new
<p>Microfabrication is the process of <a href="/facts/Manufacturing/3qW7bcdy">fabricating</a> miniature structures of <a href="/facts/Micrometre/7eDFxD2L">micrometre</a> scales and smaller. Historically, the earliest microfabrication processes were used for <a href="/facts/Integrated_circuit/fjn6vg7C">integrated circuit</a> fabrication, also known as "<a href="/facts/Semiconductor_manufacturing/Jd23Mu1z">semiconductor manufacturing</a>" or "semiconductor device fabrication". In the last two decades, <a href="/facts/Microelectromechanical_systems/TkhEzDpm">microelectromechanical systems</a> (MEMS), microsystems (European usage), <a href="/facts/Micromachinery/FIGvxbv9">micromachines</a> (Japanese terminology) and their subfields have re-used, adapted or extended microfabrication methods. These subfields include <a href="/facts/Microfluidics/UW3LnTdE">microfluidics</a>/lab-on-a-chip, optical MEMS (also called MOEMS), RF MEMS, PowerMEMS, BioMEMS and their extension into nanoscale (for example NEMS, for nano electro mechanical systems). The production of <a href="/facts/Flat-panel_displays/jw0LWETN">flat-panel displays</a> and solar cells also uses similar techniques. </p><p>Miniaturization of various devices presents challenges in many areas of science and engineering: <a href="/facts/Physics/a7aH2y08">physics</a>, <a href="/facts/Chemistry/SrNqkGVm">chemistry</a>, <a href="/facts/Materials_science/N5HrXRYW">materials science</a>, <a href="/facts/Computer_science/lN3pEyPz">computer science</a>, ultra-precision engineering, fabrication processes, and equipment design. It is also giving rise to various kinds of interdisciplinary research. The major concepts and principles of microfabrication are <a href="/facts/Microlithography/LFwpJbE7">microlithography</a>, <a href="/facts/Doping_(semiconductor)/WrGdtWnm">doping</a>, <a href="/facts/Thin_films/nSeoUT4Q">thin films</a>, <a href="/facts/Etching/PM0FmoSb">etching</a>, <a href="/facts/Wire_bonding/e0qvKlGv">bonding</a>, and <a href="/facts/Polishing/SqMg0yh9">polishing</a>. </p>