The toxicology of AlGaN has not been fully investigated. The AlGaN dust is an irritant to skin, eyes and lungs. The environment, health and safety aspects of aluminium gallium nitride sources (such as trimethylgallium and ammonia) and industrial hygiene monitoring studies of standard MOVPE sources have been reported recently in a review.3
Growth and Characterization of Aluminum Gallium Nitride... http://my.ece.ucsb.edu/Mishra/resgroupfiles/parish.pdf ↩
Noguchi Norimichi; Hideki Hirayama; Tohru Yatabe; Norihiko Kamata (2009). "222 nm single-peaked deep-UV LED with thin AlGaN quantum well layers". Physica Status Solidi C. 6 (S2): S459 – S461. Bibcode:2009PSSCR...6S.459N. doi:10.1002/pssc.200880923. https://onlinelibrary.wiley.com/doi/abs/10.1002/pssc.200880923 ↩
Shenai-Khatkhate, D. V.; Goyette, R.; DiCarlo, R. L. Jr.; Dripps, G. (2004). "Environment, Health and Safety Issues for Sources Used in MOVPE Growth of Compound Semiconductors". Journal of Crystal Growth. 272 (1–4): 816–821. Bibcode:2004JCrGr.272..816S. doi:10.1016/j.jcrysgro.2004.09.007. /wiki/Bibcode_(identifier) ↩